Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1991-01-18
1993-06-01
Karlsen, Ernest F.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324 96, 358106, G01R 3128
Patent
active
052163598
ABSTRACT:
Internal test sites on integrated circuit chips may be tested with minimal input/output pad or chip area overhead by providing transient interconnections to the internal test sites using an optically activated photoconductive layer which is formed over the active device layers of the integrated circuit to be tested. The photoconductive layer may be optically activated using an optical mask or hologram, to electrically access the desired internal test sites. Different test sites may be tested using different masks or holograms. The photoconductive layer is preferably hydrogenated amorphous silicon which is highly compatible with standard integrated circuit processing.
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Daneshvar Kasra
Greene Richard F.
Makki Rafic Z.
Tranjan Farid M.
Burns William J.
Karlsen Ernest F.
University of North Carolina
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