Electro-optical device with amorphous and crystalline shift regi

Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Amorphous semiconductor material

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257 72, 349 42, H01L 2904, H01L 31036, H01L 310376, G02F 11343

Patent

active

056486626

ABSTRACT:
A method of fabricating silicon TFTs (thin-film transistors) is disclosed. The method comprises a crystallization step by laser irradiation effected after the completion of the device structure. First, amorphous silicon TFTs are fabricated. In each of the TFTs, the channel formation region, the source and drain regions are exposed to laser radiation illuminated from above or below the substrate. Then, the laser radiation is illuminated to crystallize and activate the channel formation region, and source and drain regions. After the completion of the device structure, various electrical characteristics of the TFTs are controlled. Also, the amorphous TFTs can be changed into polysilicon TFTs.

REFERENCES:
patent: 4368523 (1983-01-01), Kawate
patent: 4778773 (1988-10-01), Sukegawa
patent: 4797108 (1989-01-01), Crowther
patent: 4803536 (1989-02-01), Tuan
patent: 4838654 (1989-06-01), Hamaguchi et al.
patent: 4864376 (1989-09-01), Adki et al.
patent: 4948231 (1990-08-01), Aoki et al.
patent: 5040875 (1991-08-01), Noguchi
patent: 5063378 (1991-11-01), Roach
patent: 5071779 (1991-12-01), Tanaka et al.
patent: 5153702 (1992-10-01), Aoyama et al.
patent: 5200847 (1993-04-01), Mawatari et al.

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