Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate
2007-10-16
2007-10-16
Lebentritt, Michael (Department: 2812)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Responsive to electromagnetic radiation
C438S048000, C438S029000, C257S432000, C257S098000
Reexamination Certificate
active
11042292
ABSTRACT:
To provide a manufacturing method of an electro-optical device capable of effectively forming self-emitting elements in a large substrate on which a plurality of small substrates are arranged in a plane, without increasing the size of a manufacturing apparatus, the electro-optical device manufactured by the method, and an electronic apparatus equipped with the same. When manufacturing an organic EL display device by bonding a plurality of small substrates, processes required for a laser annealing technique and a photolithography technique, such as a process of forming TFTs and a process of forming pixel electrode, are performed before a process of bonding the small substrates to the large substrate, and organic EL elements are formed by an inkjet method after the bonding process. Further, a protective film is formed on the small substrates while the organic EL display elements are being formed.
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Laser Cutting of thick ceramic substrates by controlled fracture technique□□Chwan-Huei Tsai, Hong-Wen Chen, 2003.
Tsai et al. Laser cutting of thick ceramic substrates by controlled fracture technique.
Gyoda Kozo
Nozawa Ryoichi
Lebentritt Michael
Mustapha Abdulfattah
Oliff & Berridg,e PLC
Seiko Epson Corporation
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