Etching a substrate: processes – Forming or treating optical article
Patent
1997-05-09
1999-02-09
Powell, William
Etching a substrate: processes
Forming or treating optical article
216 23, 216 38, 216 41, 349 42, 349122, B44C 122
Patent
active
058689516
ABSTRACT:
A method for making an electro-optic device or electro-optic display system having enhanced performance over conventional flat-panel displays, wherein a planarizing polymeric resin layer is spin-cast on a flat-panel backplane containing pixel circuitry. The spin-cast layer is cured to provide a flat backplane. Vias are opened in the cured polymeric resin to each pixel. Metal is deposited to fill the vias and to form a confluent, overlying metal layer on the upper surface. The metal layer is patterned and etched to form individual mirrors over each pixel. The metal acts as both a switchable electrode and as a high aperture, highly reflective mirror over each pixel. Electro-optic devices which may be made using such a process are also disclosed.
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Johnson Kristina M.
McKnight Douglas J.
Schuck, III Miller H.
Powell William
University Technology Corporation
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