Electro-optical device and manufacturing method thereof

Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Field effect device in non-single crystal – or...

Reexamination Certificate

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C438S149000

Reexamination Certificate

active

07049634

ABSTRACT:
An electro-optical device having high operation performance and reliability, and a manufacturing method thereof. A TFT structure which is strong agains hot carrier injection is realized by disposing a Lov region207in an n-channel TFT203which forms a driver circuit. Further, Loff regions217to220and offset region are disposed in an n-channel TFT304which forms a pixel section, and a TFT structure of low OFF current value is realized. Further, by reducing the n-type impurity element contained in Loff regions217to220to approximately 1×1016to 5×1018atoms/cm3, further reduction of OFF current can be performed.

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