Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Patent
1996-02-06
1998-06-16
Karlsen, Ernest F.
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
324 96, G01R 31308
Patent
active
057676887
ABSTRACT:
A processing unit notifies a drive unit of a designated number N (=1, 2, . . . ) The drive unit supplies a drive signal of a frequency f.sub.0 to a target measurement device, and supplies a modulation signal of a frequency N.multidot.f.sub.0 +.DELTA.f to a light source. In this state, an intensity-modulated light beam is emitted from a light source, incident on an E-O probe through an optical system including a PBS and a wave plate, influenced by a periodical voltage waveform generated at a target measurement portion at a fundamental period 1/f.sub.0 to modulate the polarized state, and output from the E-O probe. The optical signal whose polarized state is modulated is input to a photodetector after a polarization direction is selected by the PBS, and heterodyne-detected. The processing unit reproduces the waveform of the voltage signal generated at the target measurement portion by Fourier transform on the basis of the obtained calculation of photodetection signal and displays the waveform.
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Kolner et al, "Electrooptic Sampling Sampling in GaAs Integrated Circuits", IEEE Journal of Quantum Electronics, vol. QE-22, No. 1, Jan. 1986, pp. 79-93.
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Aoshima et al, "Non-Contact Picosecond Electro-Optic Sampling with a Semiconductor Laser", T. IEEE Japan, vol. 111-C, No. 4, '91, pp. 145-154.
Takahashi et al, "How the Electro-Optic Probing System can Contribute to LSI Testing?", IMTC '94, May 10-12, Hamamatsu, pp. 1484-1491.
Kamiya Takeshi
Takahashi Hironori
Tsuchiya Yutaka
Hamamatsu Photonics K.K.
Kamiya Takeshi
Karlsen Ernest F.
Kobert Russell M.
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