Electro-optic modulator on rib waveguide

Details Electro-optic modulator on rib waveguide Electro-optic modulator on rib waveguide

2004-04-09

2009-06-30

Pak, Sung H (Department: 2874)

Optical waveguides

Temporal optical modulation within an optical waveguide

Electro-optic

C385S014000

Reexamination Certificate

active

07555173

ABSTRACT:
An electro-optic modulator is formed on a silicon-on-insulator (SOI) rib waveguide. An optical field in the modulator is confined by using an electrically modulated microcavity. The microcavity has reflectors on each side. In one embodiment, a planar Fabry-Perot microcavity is used with deep Si/SiO2Bragg reflectors. Carriers may be laterally confined in the microcavity region by employing deep etched lateral trenches. The refractive index of the microcavity is varied by using the free-carrier dispersion effect produced by a p-i-n diode formed about the microcavity. In one embodiment, the modulator confines both optical field and charge carriers in a micron-size region.

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patent: WO 2079863 (2002-10-01), None

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