Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Patent
1993-07-22
1997-01-07
Nguyen, Vinh P.
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
324 96, 324750, G01R 2912
Patent
active
055921019
ABSTRACT:
An electric field measuring apparatus for causing an optical probe head having an electro-optic member with an electro-optic material to oppose a sample such as a semiconductor integrated circuit device and for optically measuring a voltage of an opposite portion of the sample. The electro-optic material consists of an LiTaO.sub.3 electro-optic crystal or the like, the polarization characteristics of which change depending on the electric-field strength of the sample. The electro-optic member is supported on a guide mechanism to be reciprocally movable within a predetermined stroke range in a direction of the sample. The guide mechanism is reciprocated in the direction of the sample to control the distance between the electro-optic material and the sample. In measurement, light is incident on the electro-optic material whose polarization characteristics change depending on the electric-field strength, and the light intensity of a predetermined polarized component of the light reflected by the electro-optic material is detected, thereby measuring the electric-field strength and voltage of the sample. When if the electro-optic member is brought into contact with the sample, the sample is not damaged due to the stroke set in the guide mechanism. The simple structure of the guide mechanism realizes improvement of operability. The electro-optic member can therefore safety approach the sample to increase the measurement sensitivity.
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Aoshima Shinichiro
Hirano Isuke
Takahashi Hironori
Hamamatsu Photonics K.K.
Nguyen Vinh P.
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