Electro-micro-mechanical shutters on transparent substrates

Details Electro-micro-mechanical shutters on transparent substrates Electro-micro-mechanical shutters on transparent substrates

1993-09-07

1996-09-03

Phan, James

Optical: systems and elements

Light control by opaque element or medium movable in or...

Electro-mechanical

359227, 359234, 359236, G02B 2602

Patent

active

055529259

ABSTRACT:
A micro-mechanical shutter array using micro-mechanical technology and silicon-on-transparent-substrate technology. The micro-mechanical shutter array is operated by using electro-static forces. Two basic types of shutter movements are described, viz. an electric force/electric counter-force and an electric force/mechanical (spring) counter-force.

REFERENCES:
patent: 4549223 (1985-10-01), Ozawa
patent: 5062689 (1991-11-01), Koehler
patent: 5078479 (1992-01-01), Vuilleumier
patent: 5233459 (1993-08-01), Bozler et al.

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