Chemistry: electrical and wave energy – Apparatus – Electrolytic
Reexamination Certificate
2005-10-05
2011-12-13
Neckel, Alexa D. (Department: 1723)
Chemistry: electrical and wave energy
Apparatus
Electrolytic
C204S252000, C204S282000, C205S663000
Reexamination Certificate
active
08075745
ABSTRACT:
A polishing pad includes a guide plate having a plurality of holes therein and being affixed to a compressible under-layer; and a plurality of conducting polishing elements each affixed to the compressible under-layer and passing through a sealed contact with a proton exchange membrane and corresponding hole in the guide plate so as to be maintained in a substantially vertical orientation with respect to the compressible under-layer but being translatable in a vertical direction with respect to the guide plate. The polishing pad may also include a slurry distribution material fastened to the guide plate by an adhesive. Pad wear sensors may also be provided in the polishing pad.
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Neckel Alexa D.
Semiquest Inc.
Smith Nicholas A.
SNR Denton US LLP
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