Electro mechanical device having a sealed cavity

Details Electro mechanical device having a sealed cavity Electro mechanical device having a sealed cavity

2007-06-05

2007-06-05

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S189000, C310S324000

Reexamination Certificate

active

10813026

ABSTRACT:
Briefly, embodiments of the present invention provide an electro-mechanical device, for example, a Micro-Electro-Mechanical Systems (MEMS) device, for example, a low-loss Film Bulk Acoustic Resonators (FBAR) filter, and a process to produce the same.

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