Electro mechanical device and manufacturing method thereof,...

Details Electro mechanical device and manufacturing method thereof,... Electro mechanical device and manufacturing method thereof,...

2007-04-09

2009-06-02

Takaoka, Dean O (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S191000

Reexamination Certificate

active

07541895

ABSTRACT:
An electro mechanical device including: a main body of an electro mechanical device having a lower electrode and a movable member; an overcoat film sealing the main body of the electro mechanical device by maintaining a space, wherein a support post is provided between the overcoat film and the movable member.

REFERENCES:
patent: 7002436 (2006-02-01), Ma et al.
patent: 7045459 (2006-05-01), Freidhoff
patent: 7463116 (2008-12-01), Naniwada
patent: 2002-094328 (2002-03-01), None
Clark T.C. Nguyen; Microelectromechanical Components for Miniaturized Low-Power Communications; IEEE MTT—S International Microwave Symposium RFMEMS Workshop; Jun. 18, 1999; pp. 48-77.

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