Electro-mechanical component, such as a strained Si Fin-FET

Details Electro-mechanical component, such as a strained Si Fin-FET Electro-mechanical component, such as a strained Si Fin-FET

2004-01-31

2010-11-23

Pert, Evan (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

C257SE27026

Reexamination Certificate

active

07838950

ABSTRACT:
The present invention is an electro mechanical component, such as a nano-electro-mechanical component, having a first, a second and a third portion arranged such that the second portion is used to functionally connect the first and the third portion. In the present invention, the second portion is a bilayer having a first and a second layer made from two dissimilar at least semiconductive materials; the two materials have different lattice constants; and the first layer harbors tensile strain close to an interface connecting the first and the second layer and harbors compressive strain at its surface; and the second layer harbors compressive strain close to the interface connecting the first and the second layer and tensile strain at the relaxed outer section.

REFERENCES:
Golod S Vet Al: “Fabricaiton of Conducting GESI/SI Micro- and Nanotubes˜ and Helical Microcoils”Semiconductor Science and Technology, Institute of Physics. London, GB, vol. 16, No. 3, Mar. 2001, pp. 181-185, XP001030220.
Fabricaiton of Conducting GESI/SI Micro- and Nanotubes and Helical Microcoils Semiconductor Science and Technology, Institute of Physics. London, GB, vol. 16, No. 3, Mar. 2001, pp. 181-185.
XP001030220 Mar. 3, 2001 Golod S V et al Fabrication of conducting gesi/si micro- and nanotubes and helical microcoils.
XP002331066 Sep. 5, 2002 Schmidt O G et al Self-assembled nanoholes, lateral quantum-dot molecules, and rolled-up nanotubes.
XP001122727 Jun. 6, 2002 Vorob'ev A B et al Directional rolling of strained heterofilms.
XP010596836 Jul. 1, 2002 Vorob'ev A B et al Magnetotransport properties of two-dimensional electron gas on cylindrical surface.
XP012027928 May 7, 2001 Vaccaro Pablo O et al Strain-driven self-positioning of micromachined structures.

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