Electrical generator or motor structure – Dynamoelectric – Linear
Patent
1997-11-03
1999-12-07
Ramirez, Nestor
Electrical generator or motor structure
Dynamoelectric
Linear
310 54, H02K 4100, H02K 919
Patent
active
059988894
ABSTRACT:
A lithographic system includes a chamber housing a stage mechanism and a linear motor coil that drives the stage mechanism. The linear motor includes a coil having two sidewalls, the coil being movable along a magnet track generating a magnetic field. A pair of jacket walls are attached to respective ones of each of the coil sidewalls. Each jacket wall has a pair of relatively thin non-magnetic plates of about 0.75 mm thickness bonded together, at least one facing surface of each of the plates including a liquid flow channel. The plates are made of a non-conductive (and non-magnetic) material, e.g. ceramic such as alumina. Coolant liquid from a liquid source flows through the flow channel in each of the jacket walls. In one embodiment a cooling system is provided where the linear motor coil has a cooling and recirculation circuit including a tank which is kept at a negative pressure of from about -3 psig to about -13 psig. In another embodiment a cooling system is provided where the force produced by the motor coil is minimized so that heat dissipation from the motor coil during a low duty cycle is substantially identical to heat dissipation in a high duty cycle. This is done in a three-phase motor coil by having two phases energized to provide force in sum total equal and opposite to the force from the remaining phase.
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Chun Debra A.
Jones Judson H.
MacDonald Thomas S.
Nikon Corporation
Ramirez Nestor
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