Electro-magnetic lens, charged particle beam transferring appara

Details Electro-magnetic lens, charged particle beam transferring appara Electro-magnetic lens, charged particle beam transferring appara

1995-06-02

1997-05-13

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

335210, H01J 37141

Patent

active

056295260

ABSTRACT:
A charged particle beam transferring apparatus includes a pair of electro-magnetic lenses spaced apart in the direction of the optical axis. Each electro-magnetic lens consists of a coil and core made of magnetic material and having two magnetic poles. The core of at least one of the electro-magnetic lenses is made of ferrite. An insulating member supports the two magnetic poles of the core of the at least one of the electro-magnetic lenses between its two magnetic poles.

REFERENCES:
patent: 2637000 (1953-04-01), Page
patent: 4785176 (1988-11-01), Frosien et al.
patent: 5057689 (1991-10-01), Nomura et al.
patent: 5334282 (1994-08-01), Nakayama et al.
patent: 5382800 (1995-01-01), Nishino et al.

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