Electro-magnetic alignment device

Details Electro-magnetic alignment device Electro-magnetic alignment device

1983-06-10

1984-11-27

Gellner, Michael L.

Electricity: motive power systems

Positional servo systems

With particular 'error-detecting' means

318653, 318687, 269 58, 355133, G05B 106

Patent

active

044853394

ABSTRACT:
This invention is directed to electro-magnetic alignment devices, which are particularly adapted, among other possible uses, for use in aligning the wafers in a microlithography system, said devices comprising in combination a base plate, a first current carrying coil assembly mounted on the base plate, a second current carrying coil assembly mounted on the base plate in spaced relationship with respect to the first coil assembly, a first magnet mounted adjacent the first coil assembly and a second magnet mounted adjacent the second coil assembly, an upper connecting piece connecting the first and second magnets, a mount for receiving an object on the upper connecting piece, the base plate and magnets and upper connecting piece coacting to form a magnetic circuit, a controller for controlling the flow and direction of current through the coil assemblies to move the magnets and upper connecting piece with respect to the base plate, a plurality of linear actuators mounted between the magnets and the upper connecting piece respectively for moving the connecting piece with respect to the magnets.

REFERENCES:
patent: 4087729 (1978-05-01), Yamazaki et al.

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