Electricity: motive power systems – Positional servo systems – With particular 'error-detecting' means
Patent
1983-06-10
1984-11-27
Gellner, Michael L.
Electricity: motive power systems
Positional servo systems
With particular 'error-detecting' means
318653, 318687, 269 58, 355133, G05B 106
Patent
active
044853394
ABSTRACT:
This invention is directed to electro-magnetic alignment devices, which are particularly adapted, among other possible uses, for use in aligning the wafers in a microlithography system, said devices comprising in combination a base plate, a first current carrying coil assembly mounted on the base plate, a second current carrying coil assembly mounted on the base plate in spaced relationship with respect to the first coil assembly, a first magnet mounted adjacent the first coil assembly and a second magnet mounted adjacent the second coil assembly, an upper connecting piece connecting the first and second magnets, a mount for receiving an object on the upper connecting piece, the base plate and magnets and upper connecting piece coacting to form a magnetic circuit, a controller for controlling the flow and direction of current through the coil assemblies to move the magnets and upper connecting piece with respect to the base plate, a plurality of linear actuators mounted between the magnets and the upper connecting piece respectively for moving the connecting piece with respect to the magnets.
REFERENCES:
patent: 4087729 (1978-05-01), Yamazaki et al.
Gellner Michael L.
Grimes Edwin T.
Murphy Thomas P.
Rutledge Della J.
The Perkin-Elmer Corporation
LandOfFree
Electro-magnetic alignment device does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Electro-magnetic alignment device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electro-magnetic alignment device will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2136366