Electricity: motive power systems – Positional servo systems – With particular 'error-detecting' means
Patent
1983-06-10
1985-03-26
Hix, L. T.
Electricity: motive power systems
Positional servo systems
With particular 'error-detecting' means
318687, 318 38, 318640, 318135, 355133, 269 58, G05B 106
Patent
active
045075972
ABSTRACT:
This invention is directed to electromagnetic alignment apparatus, which is particularly adapted, among other possible uses, for use in aligning the wafers in a microlithography system, said apparatus comprising in combination a first magnetic circuit having a plurality of elements including a first magnet; a second magnetic circuit having a plurality of elements including a second magnet; the second magnetic circuit being disposed in spaced relationship with respect to the first magnetic circuit; a movable structural component adapted for mounting an object thereon; one element of each magnetic circuit being fixedly attached to the movable structural component; first and second current carrying coil assemblies mounted in the first magnetic circuit; the second coil assembly being disposed at an angle with respect to the first coil assembly; third and fourth current carrying coil assemblies mounted in the second magnetic circuit; the fourth coil assembly being disposed at an angle with respect to the third coil assembly; and control apparatus for controlling the flow and direction of the current through the coil assemblies, respectively.
REFERENCES:
patent: Re27289 (1972-02-01), Sawyer
patent: Re27436 (1972-07-01), Sawyer
patent: 3889164 (1975-06-01), Nishizawa et al.
patent: 4087729 (1978-05-01), Yamazaki et al.
Grimes Edwin T.
Hix L. T,.
Masselle F. L.
Murphy Thomas P.
Rutledge Della J.
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