Electro-less discharge extreme ultraviolet light source

Details Electro-less discharge extreme ultraviolet light source Electro-less discharge extreme ultraviolet light source

2005-07-28

2009-10-20

Vanore, David A (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C250S492200, C250S492220, C250S493100, C250S505100, C378S119000, C378S034000, C378S124000, C378S143000

Reexamination Certificate

active

07605385

ABSTRACT:
An electrode-less discharge source of extreme ultraviolet (EUV) radiation (10) efficiently assembles a hot, dense, uniform, axially stable plasma column (5) with magnetic pressure and inductive current drive. It employs theta-pinch-type magnetic compression of plasma confined in a magnetic mirror. Plasma, confined in a magnetic mirror, is made to radiate by resonant magnetic compression. The device comprises a radiation-source gas input nozzle (1), an optional buffer-gas input flow (2), mirror-field coils (9a, 9b), theta-pinch coils (8a, 8b), a plasma and debris dump (11), and an evacuation port (7). The circular currents yield an axially stable plasma-magnetic-field geometry, and a reproducible, stable, highly symmetrical EUV source.

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PCT/US2005/026796, International Search Report and the Written Opinion, Jan. 19, 2006, 8 pages.

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