Chemistry: electrical and wave energy – Apparatus – Electrolytic
Reexamination Certificate
2011-04-19
2011-04-19
Neckel, Alexa D. (Department: 1723)
Chemistry: electrical and wave energy
Apparatus
Electrolytic
C204S242000, C205S640000, C205S686000
Reexamination Certificate
active
07927469
ABSTRACT:
A processor for making porous silicon or processing other substrates has first and second chamber assemblies. The first and second chamber assemblies include first and second seals for sealing against a wafer, and first and second electrodes, respectively. The second seal is moveable towards and away from a wafer in the processor, to move between a wafer load/unload position, and a wafer process position. The second electrode may move with the second seal. A light source shines light onto the first side of the wafer. The processor may be pivotable from a substantially horizontal orientation, for loading and unloading a wafer, to a substantially vertical orientation, for processing a wafer.
REFERENCES:
patent: 5335012 (1994-08-01), Lisec
patent: 5376241 (1994-12-01), Shor et al.
patent: 6252203 (2001-06-01), Zapata et al.
patent: 6585875 (2003-07-01), Ryabkov
patent: 6726815 (2004-04-01), Artmann et al.
patent: 7153195 (2006-12-01), Lee et al.
patent: 2003/0132118 (2003-07-01), Kovarsky
patent: 2004/0134787 (2004-07-01), Pedersen et al.
United States Patent And Trademark Office, International Search Report and Written Opinion for PCT/US07/71474, mailed Aug. 6, 2008.
Lehmann, Volker, “Electrochemistry of Silicon,” Dec. 31, 2002, pp. 5-22, Wiley-VCH Verlag GmvH, Weinheim Germany.
Hanson Kyle M.
Lund Erik
McHugh Paul R.
Peace Steven L.
Stewart Nigel
Neckel Alexa D.
Ohriner Kenneth H.
Perkins Coie LLP
Semitool Inc.
Smith Nicholas A.
LandOfFree
Electro-chemical processor does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Electro-chemical processor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electro-chemical processor will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2729735