Electro-chemical processor

Details Electro-chemical processor Electro-chemical processor

2011-03-22

2011-03-22

Neckel, Alexa D. (Department: 1723)

Chemistry: electrical and wave energy

Apparatus

Electrolytic

C204S242000, C205S640000, C205S686000

Reexamination Certificate

active

07909967

ABSTRACT:
An electro-chemical processor for making porous silicon or processing other substrates has first and second chamber assemblies. The first and second chamber assemblies include first and second seals for sealing against a wafer, and first and second electrodes, respectively. The first seal is moveable towards and away from a wafer in the processor, to move between a wafer load/unload position, and a wafer process position. The first electrode may move along with the first seal. The processor may be pivotable from a substantially horizontal orientation, for loading and unloading a wafer, to a substantially vertical orientation, for processing a wafer.

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United States Patent and Trademark Office, International Search Report and Written Opinion for PCT/US07/71474, mailed Aug. 6, 2008.

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