Chemistry: electrical and wave energy – Apparatus – Electrolytic
Reexamination Certificate
2011-05-03
2011-05-03
Neckel, Alexa D. (Department: 1723)
Chemistry: electrical and wave energy
Apparatus
Electrolytic
C204S267000, C205S640000, C205S686000
Reexamination Certificate
active
07935230
ABSTRACT:
A processor for making porous silicon or processing other substrates has first and second chamber assemblies. The first and second chamber assemblies include first and second seals for sealing against a wafer, and first and second electrodes, respectively. The first and/or second seal is moveable towards and away from a wafer in the processor, to move between a wafer load/unload position, and a wafer process position. The first electrode may move along with the first seal, and the second electrode may move along with the second seal. A light source shines light onto the first side of the wafer. The processor may be pivotable from a substantially horizontal orientation, for loading and unloading a wafer, to a substantially vertical orientation, for processing a wafer.
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Hanson Kyle M.
Lund Erik
McHugh Paul R.
Peace Steven L.
Stewart Nigel
Neckel Alexa D.
Ohriner Kenneth H.
Perkins Coie LLP
Semitool Inc.
Smith Nicolas A.
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