Electro-actuated microlens assemblies

Details Electro-actuated microlens assemblies Electro-actuated microlens assemblies

1998-12-11

2000-07-18

Mai, Huy

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359298, 359619, G02F 103

Patent

active

060915374

ABSTRACT:
A micro-machined movable microlens assembly is formed on undoped or pure a semiconductor substrate. The movable microlens assemblies are to be actuated using force generators which cause various mechanical degrees of freedom depending upon the type of stage suspension and actuation used.

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"Electrostatic-comb Drive of Lateral Polysilicon Resonators", by William C. Tang, Tu-Cuong H. Nguyen, Michael W. Judy & Roger W. Howe, Transducers '89, Proceedings of the 5.sup.th International Conference on Solid-State Sensors and Actuators and Eurosensors III, vol. 2, pp. 328-331, Jun., 1990 .

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