Semiconductor device manufacturing: process – Electron emitter manufacture
Reexamination Certificate
2005-12-06
2005-12-06
Coleman, W. David (Department: 2823)
Semiconductor device manufacturing: process
Electron emitter manufacture
C438S795000, C313S249000
Reexamination Certificate
active
06972203
ABSTRACT:
A method according to the present invention is for electrifying a plurality of electric conductors arranged on a substrate including the step of setting an average temperature difference during electrifying processing between a region S0in that the plurality of electric conductors on the substrate are arranged and a circumferential region S1of the region S0at 15° C. or more, and the substrate satisfies the relational expression:in-line-formulae description="In-line Formulae" end="lead"?L1/L0>EαΔT/σth−1.in-line-formulae description="In-line Formulae" end="tail"?where L0[m]: the width of the region S0L1[m]: the width of the region S1ΔT[K]: the average temperature differenceE[Pa]: the Young's modulus of the substrateα[/K]: the coefficient of linear thermal expansion of the substrateσth[Pa]: the material constant of the substrate.
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Canon Kabushiki Kaisha
Coleman W. David
Fitzpatrick ,Cella, Harper & Scinto
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