Electrically tunable optical filter utilizing a deformable multi

Optical: systems and elements – Optical modulator – Light wave temporal modulation

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356352, 257419, G02B 2600

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active

057399450

ABSTRACT:
An electrically tunable optical filter utilizing a deformable multi-layer mirror construction.

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Jerman et al., "A Miniature Fabry-Perot Interferometer With A Corrugated Silicon Diaphragm Support", Sensor and Actuators A, 29 (1991), pp. 151-158.
Goossen et al., "Silicon Modulator Based On Mechanically-Active Anti-Reflection Layer With 1 Mbit/sec Capability For Fiber-In-The-Loop Applications", IEEE Photonics Technology Letters, vol. 6, No. 9, Sep. 1994, pp. 1119-1121.
Larson et al., "Broadly Tunable Resonant-Cavity Light Emission", Appl. Phys. Lett., vol. 67, No. 5, 31 Jul. 1995, pp. 590-592.

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