Electrically rotationally actuatable micro-mirror or micro lens

Details Electrically rotationally actuatable micro-mirror or micro lens Electrically rotationally actuatable micro-mirror or micro lens

2004-09-07

2008-08-05

Choi, William C (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S198100, C359S210100, C359S225100

Reexamination Certificate

active

07408695

ABSTRACT:
Micro-mirror or micro-lens made up of a moving part (10) with a reflective or refringent zone (17), a fixed part (14), means of connection (13) of the moving part (10) to the fixed part (14) which forms an axis of rotation (12) for the moving part (10) and of means for controlling (18) the rotation. The means of control include two or more actuators (19) arranged either side of the axis (12), each formed of a fixed electrode (20) forming part of the fixed part (14) and a moving electrode (21) possessing a free end (21.1) and an end connected to a drive arm (23) which is substantially parallel to the axis (12) and emerging from the moving part (10). The moving electrode (21) adheres to the fixed electrode (20) from its free end (21.1) when a voltage is applied to the actuator (19), the adhesion is a function of the applied voltage.Application to optical systems.

REFERENCES:
patent: 6115231 (2000-09-01), Shirakawa
patent: 6633212 (2003-10-01), Ruan et al.
patent: 1193528 (2002-04-01), None
Search Report (French Preliminary) FR 0350508000 (Sep. 8, 2003).
Senturia, J.R. Gilbert, et al., “Two-Phase Actuators: Stable Zipping Devices Without Fabrication Of Curved Structures”, Solid-State Sensor and Actuator Workshop, Jun. 1996, Hilton Head S.C., (pp. 98-100).
Schwart, Wilfrid, et al., “A Micromachined Deformable Mirror For Adaptive Optics”, Moems And Miniaturized Systems III, Proc. Of SPIE vol. 498, vol. 4983 (Jan. 29, 2003), pp. 230-241.
Patterson, Pamela R., et al., “A Scanning Micromirror With Angular Comb Drive Actuation”, (2000 IEEE), pp. 544-547.

Affiliated with

Also associated with

Rating

Electrically rotationally actuatable micro-mirror or micro lens does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electrically rotationally actuatable micro-mirror or micro lens, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electrically rotationally actuatable micro-mirror or micro lens will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4010898