Electrically programmable π-shaped fuse structures and...

Details Electrically programmable π-shaped fuse structures and... Electrically programmable π-shaped fuse structures and...

2007-10-30

2007-10-30

Nhu, David (Department: 2818)

Active solid-state devices (e.g., transistors, solid-state diode

Gate arrays

With particular signal path connections

C257S347000, C257S529000, C257SE21170, C257SE21320, C257SE21632

Reexamination Certificate

active

11372380

ABSTRACT:
Electrically programmable fuse structures for an integrated circuit and methods of fabrication thereof are presented, wherein the electrically programmable fuse has a first terminal portion and a second terminal portion interconnected by a fuse element. The first terminal portion and the second terminal portion reside over a first support and a second support, respectively, with the first support and the second support being spaced apart, and the fuse element bridging the distance between the first terminal portion over the first support and the second terminal portion over the second support. The fuse, first support and second support define a α-shaped structure in elevational cross-section through the fuse element. The first terminal portion, second terminal portion and fuse element are coplanar, with the fuse element residing above a void, which in one embodiment is filed by a thermally insulating dielectric material that surrounds the fuse element.

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