Electrically programmable link structures and methods of making

Details Electrically programmable link structures and methods of making Electrically programmable link structures and methods of making

1991-07-25

1993-11-02

Carroll, J.

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Passive components in ics

257637, 257640, 257649, 257750, 257763, H01L 2934, H01L 2946, H01L 2954, H01L 2348

Patent

active

052586430

ABSTRACT:
Methods and systems are disclosed for fabricating electrically programmable link structures by fabricating a first conductor, which comprises a refractory conductive material, then fabricating an insulative link material over the refractory conductive material and, subsequently, depositing an upper conductive material over the link material. In use, an electrical path can be formed between the first and second conductive elements by applying a voltage between such elements across at least one selected region of the insulator, such that the insulative link material is transformed in the region and rendered conductive to form an electrical signal path. The link material is preferably a silicon oxide insulator and

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