Electrically programmable antifuse element incorporating a diele

Details Electrically programmable antifuse element incorporating a diele Electrically programmable antifuse element incorporating a diele

1990-04-12

1991-12-03

James, Andrew J.

Fishing, trapping, and vermin destroying

437193, 57 54, 57 67, 57 71, H01L 2702

Patent

active

050703846

ABSTRACT:
An electrically programmable antifuse element incorporates a composite interlayer of dielectric material and amorphous silicon interposed between two electrodes. The lower electrode may be formed from a refractory metal such as tungsten. Preferably, a thin layer of titanium is deposited over the tungsten layer and its surface is then oxidized to form a thin layer of titanium oxide which serves as the dielectric material of the composite dielectric/amorphous silicon interlayer. A layer of amorphous silicon is then deposited on top of the titanium oxide dielectric to complete the formation of the composite interlayer. A topmost layer of a refractory metal such as tungsten is then applied over the amorphous silicon to form the topmost electrode of the antifuse.

REFERENCES:
patent: 4748490 (1988-05-01), Hollingsworth
patent: 4823181 (1989-04-01), Mohsen et al.
patent: 4876220 (1989-10-01), Mohsen et al.
patent: 4899205 (1990-02-01), Hamdy et al.

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