Electrically programmable antifuse and fabrication processes

Details Electrically programmable antifuse and fabrication processes Electrically programmable antifuse and fabrication processes

1991-08-09

1993-12-21

Kunemund, Robert

Fishing, trapping, and vermin destroying

437 52, 437192, 437922, H01L 2144, H01L 21265

Patent

active

052721019

ABSTRACT:
A process for fabricating a metal-to-metal antifuse in a process sequence for forming a double layer metal interconnect structure includes the steps of forming and defining a first metal interconnect layer, forming and planarizing an inter-metal dielectric layer, forming an antifuse cell opening in the inter-metal dielectric layer, forming and defining an antifuse layer, forming metal-to-metal via holes in the inter-metal dielectric layer, and forming and defining a second metal interconnect layer.

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patent: 5059555 (1991-10-01), Iranmanesh et al.
patent: 5070384 (1991-12-01), McCollum et al.

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