Electrically modulatable thermal radiant source with specific fi

Electric heating – Heating devices – With heating unit structure

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219543, 392407, 313578, 313 15, 313325, H05D 300

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active

058274383

ABSTRACT:
The invention is related to an electrically modulatable thermal radiant source with a multilayer structure. The radiant source includes a substrate, a first insulating layer formed onto the substrate, a radiant surface layer formed onto the first insulating layer, a second insulating layer formed on the radiant surface layer, a first metallization (incandescent filament) layer formed on the second insulating layer, a third insulating layer formed on the first metallization layer, and a second metallization layer for contacting formed on the third insulating layer. According to the invention, very thin incandescent filaments are formed from the first metallization layer and surrounded by the other elements of the multilayer structure as a uniform, planar plate.

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"Electrical and Optical Characteristics of Vacuum-Sealed Polysilicon Microlamps" IEEE Transactions on Electron Devices, vol. 39 No. 6, Jun. 1992 pp. 1363-1375 by C.H. Mastrangelo et al.
"Integrated Transducer Based on Blackbody Radiation from Heated Polysilicon Filaments" IEEE 1985 pp. 364-366, H. Guckel et al.
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