Electrically isolated semiconductor integrated photodiode circui

Details Electrically isolated semiconductor integrated photodiode circui Electrically isolated semiconductor integrated photodiode circui

1984-10-22

1986-09-16

Weisstuch, Aaron

Batteries: thermoelectric and photoelectric

Photoelectric

Panel or array

136249, 29572, 29577C, 29583, 357 30, 357 47, 357 49, H01L 2714, H01L 3118

Patent

active

046124080

ABSTRACT:
An interconnected array of solar cell or photodiode devices is formed by a method which includes the steps of forming on one major surface of a semiconductor wafer a plurality of said devices, forming grooves in said one major surface extending partway into said substrate between adjacent said devices, forming an oxide layer on selected portions of said one major surface and on the surfaces of said grooves, filling the grooves with an insulating material, forming metal interconnects between adjacent devices extending over said grooves and insulating material, attaching said one major surface to an insulating support, and severing through the wafer into the grooves from the other major surface to separate adjacent devices while leaving the metal interconnects.

REFERENCES:
patent: 4131984 (1979-01-01), Kaplow et al.
patent: 4179318 (1979-12-01), Kaplow et al.
patent: 4456782 (1984-06-01), Nishiura et al.

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