Electrically isolated released microstructures

Details Electrically isolated released microstructures Electrically isolated released microstructures

1994-09-22

1998-12-08

Saadat, Mahshid D.

Active solid-state devices (e.g., transistors, solid-state diode

Combined with electrical contact or lead

257735, 156647, H01L 2348, H01L 2352, B44C 122

Patent

active

058474544

ABSTRACT:
A single mask, low temperature reactive ion etching process for fabricating high aspect ratio, released single crystal microelectromechanical structures independently of crystal orientation.

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