Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Passive components in ics
Reexamination Certificate
2005-10-04
2005-10-04
Smoot, Stephen W. (Department: 2813)
Active solid-state devices (e.g., transistors, solid-state diode
Integrated circuit structure with electrically isolated...
Passive components in ics
C257S594000, C257S623000
Reexamination Certificate
active
06952043
ABSTRACT:
A method of forming an active device is provided. The method includes performing a first patterning operation on a first plurality of layers. This first patterning operation defines a first feature of the active device. Then, a second patterning operation can be performed on at least one layer of the first plurality of layers. This second patterning operation defines a second feature of the active device. Of importance, the first and second patterning operations are performed substantially back-to-back, thereby ensuring that the active device can accurately function.
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Bhatia Manish
Cleeves James M.
Knall N. Johan
Vyvoda Michael A.
Blakely , Sokoloff, Taylor & Zafman LLP
Matrix Semiconductor Inc.
Smoot Stephen W.
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