Electrically controlled plasma uniformity in a high density...

Details Electrically controlled plasma uniformity in a high density... Electrically controlled plasma uniformity in a high density...

2006-03-28

2006-03-28

Paschall, Mark (Department: 3742)

Electric heating

Metal heating

By arc

C219S121430, C219S121410, C118S7230IR, C315S111510, C156S345480

Reexamination Certificate

active

07019253

ABSTRACT:
Apparatus including a chamber and a coil system for converting a field-generating current into a RF magnetic field in the chamber when the chamber contains an ionized gas which interacts with the RF magnetic field to create a plasma. The plasma is contained within a cylindrical region enclosed by the chamber, which region has a longitudinal center axis, and the region is considered to be made up of a plurality of annular zones concentric with the center axis and disposed at respectively different distances from the center axis. The coil system is composed of: a plurality of individual coils each positioned and dimensioned to produce a RF magnetic field which predominantly influences a respective annular zone.

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