Electrically controllable valve etched from silicon substrates

Details Electrically controllable valve etched from silicon substrates Electrically controllable valve etched from silicon substrates

1988-08-22

1989-05-02

Rosenthal, Arnold

Valves and valve actuation

Electrically actuated valve

Including solenoid

251 65, 25112907, 251368, 239585, F16K 714, F16K 3108

Patent

active

048261319

ABSTRACT:
An electrically controllable valve etched from two silicon substrates includes an inlet orifice communicating with two outlet orifices through a channel etched into the substrates. A mesa, in operative alignment with the inlet orifice, is suspended between the channel and a sealed recess by a diaphragm. The mesa has a permanent magnet attached thereto in operative alignment with a flat helical coil deposited on another substrate which seals the recess. Electronic control circuitry passes current through the coil in an appropriate direction to deflect the mesa in a corresponding direction for either opening or closing the valve. Equalized pressure is maintained on opposing mesa surfaces by a passageway communicating between the sealed recess and an outer surface of the valve thereby minimizing the force required to operate the valve.

REFERENCES:
patent: 4585209 (1986-04-01), Aine et al.
patent: 4628576 (1986-12-01), Giachino et al.
patent: 4647013 (1987-03-01), Giachino et al.

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