Electrically controllable integrated optical cross-connect

Details Electrically controllable integrated optical cross-connect Electrically controllable integrated optical cross-connect

2005-09-13

2005-09-13

Lee, John D. (Department: 2874)

Optical waveguides

With optical coupler

Switch

C385S025000, C385S017000, C385S019000, C385S039000

Reexamination Certificate

active

06944361

ABSTRACT:
An integrated optical cross-connect device and associated methods are described, the cross-connect device comprising a plurality M of input waveguides formed in a first material layer of an integrated circuit, a plurality N of output waveguides formed in a second material layer of the integrated circuit, and a plurality MN of micromechanically actuated bridge elements formed in at least one intermediate layer lying between the first and second material layers. Responsive to an electrical control signal, each bridge element establishes an index-guided, nonreflecting optical path between its associated input waveguide and its associated output waveguide. Preferably, the bridge element comprises an arcuate waveguide structure substantially surrounded by air or other nonsolid material, the arcuate waveguide structure being twistably connected to a remainder of the intermediate layer by a narrow neck portion. When electrostatically actuated, one end of the arcuate waveguide structure rises to meet the input waveguide while the other end lowers to meet the output waveguide. Associated fabrication methods and an expandable, modular cross-connect system based on the cross-connect device are also described.

REFERENCES:
patent: 3716804 (1973-02-01), Groschwitz
patent: 4013000 (1977-03-01), Kogelnik
patent: 4471474 (1984-09-01), Fields
patent: 4737003 (1988-04-01), Matsumura et al.
patent: 4773721 (1988-09-01), Erman et al.
patent: 4974923 (1990-12-01), Colak et al.
patent: 5091983 (1992-02-01), Lukosz
patent: 5299054 (1994-03-01), Geiger
patent: 5506919 (1996-04-01), Roberts
patent: 5548668 (1996-08-01), Schaffner
patent: 5581643 (1996-12-01), Wu
patent: 5796884 (1998-08-01), Wingo
patent: 5905573 (1999-05-01), Stallard et al.
patent: 5960131 (1999-09-01), Fouquet et al.
patent: 6049641 (2000-04-01), Deacon et al.
patent: 6058228 (2000-05-01), Fasanella et al.
patent: 6061482 (2000-05-01), Davis
patent: 6091867 (2000-07-01), Young et al.
patent: 6198856 (2001-03-01), Schroeder et al.
patent: 6208778 (2001-03-01), Donald
patent: 2003/0108274 (2003-06-01), Haronian
Carts-Powell, Y., “MEMS Cantilever Controls a Guided-Wave Optical Switch,” WDM Solutions (Jan. 2001), p. 9.
Chen, J. et al., “Optical Filters from Photonic Band Gap Air Bridges,” J. Lightwave Tech., vol. 14, No. 11 (Nov. 1996), pp. 2575-2580.
Duvall, C., “VCSELs May Make Metro Networks Dynamic,” WDM Solutions (Nov. 2000), pp. 35-38.
Hammadi, S. et al., “Air-Bridged Gate MESFET; A New Structure to Reduce Wave Propagation Effects in High-Frequency Transistors,” IEEE Transactions on Microwave Theory and Techniques, vol. 47, No. 6 (Jun. 1999), pp. 890-899.
Oh, K, et al., “A New Flip-Chip Bonding Technique Using Micromachined Conductive Polymer Bumps,” IEEE Transactions on Advanced Packaging, vol. 22, No. 4 (Nov. 1999), pp. 586-591.
Lau, K. Y., “MEM's the Word for Optical Beam Manipulation: Building Microelectromechanical-Based Optic Systems on a Silicon Chip,” Circuits & Devices (Jul. 1997), pp. 11-18.
Lee, S. et al., “Free-Space Fiber-Optic Switches Based on MEMS Vertical Torsion Mirrors,” J. Lightwave Tech., vol. 17, No. 1 (Jan. 1999), pp. 7-13.
Madsen, C. et al., “A Tunable Dispersion Compensating MEMS All-Pass Filter,” IEEE Photonics Technology Letters, vol. 12, No. 6 (Jun. 2000), pp. 651-653.
Muller, R. et al., “Surface-Micromachined Microoptical Elements and Systems,” Proceedings of the IEEE, vol. 86, No. 8 (Aug. 1998), pp. 1705-1720.
Neukermans, A. et al., “MEMS Technology for Optical Networking Applications,” IEEE Communications Magazine (Jan. 2001), pp. 62-69.
Ohta, A. et al., “A 12-ps-Resolution Digital Variable-Delay Macro Cell on GaAs 100 K-Gates Gate Array Using a Meshed Air Bridge Structure,” IEEE Journal of Solid-State Circuits, vol. 34, No. 1 (Jan. 1999), pp. 33-41.
Quevy, E. et al., “Realization and Actuation of Continuous-Membrane By an Array of 3D Self-Assembling Micro-Mirros For Adaptive Optics,” proceedings of the 14th IEEE International Conference on Micro Electro Mechanical Systems (2001), pp. 329-332.
Storment, C. et al., “Flexible, Dry-Released Process for Aluminum Electrostatic Actuators,” J. Microelectromechanical Systems, vol. 3, No. 3 (Sep. 1994), pp. 90-96.
Toshiyoshi, H. et al., “Design and Analysis of Micromechanical Tunable Interferometers for WDM Free-Space Optical Interconnection,” J. Lightwave Tech., vol. 17, No. 1 (Jan. 1999), pp. 19-25.

Affiliated with

Also associated with

Rating

Electrically controllable integrated optical cross-connect does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electrically controllable integrated optical cross-connect, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electrically controllable integrated optical cross-connect will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3394098