Electrically conductive Si.sub.3 N.sub.4 -C series amorphous mat

Details Electrically conductive Si.sub.3 N.sub.4 -C series amorphous mat Electrically conductive Si.sub.3 N.sub.4 -C series amorphous mat

1980-07-18

1983-07-12

Dixon, Jr., William R.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

252502, 427 95, 4272552, 428446, 428688, 428698, B05D 112, C23C 1100, B32B 904

Patent

active

043930972

ABSTRACT:
Electrically conductive Si.sub.3 N.sub.4 -C series amorphous material having excellent thermal and mechanical characteristics is produced in a massive size by chemical vapor deposition.

REFERENCES:
patent: 4036653 (1977-07-01), Jacobson
patent: 4118539 (1978-10-01), Hirai et al.
patent: 4145224 (1979-03-01), Mehalchick et al.
patent: 4178415 (1979-12-01), Ovshinsky et al.
patent: 4225355 (1980-09-01), Galasov et al.

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