Electrically conductive Si.sub.3 N.sub.4 --C series amorphous ma

Details Electrically conductive Si.sub.3 N.sub.4 --C series amorphous ma Electrically conductive Si.sub.3 N.sub.4 --C series amorphous ma

1984-08-21

1986-04-29

Lesmes, George F.

Stock material or miscellaneous articles

Composite

Of silicon containing

252502, 428367, 428408, 428688, 428698, B32B 900

Patent

active

045857040

ABSTRACT:
Electrically conductive Si.sub.3 N.sub.4 --C series amorphous material having excellent thermal and mechanical characteristics is produced in a massive size by chemical vapor deposition.

REFERENCES:
patent: 4036653 (1977-07-01), Jacobson
patent: 4158717 (1979-06-01), Nelson
patent: 4187344 (1980-02-01), Fredriksson
patent: 4393097 (1983-07-01), Hirai et al.

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