Electrically conductive protection layer and a...

Details Electrically conductive protection layer and a... Electrically conductive protection layer and a...

2011-08-16

2011-08-16

Cherry, Euncha P (Department: 2872)

Optical: systems and elements

Mirror

Including specified control or retention of the shape of a...

Reexamination Certificate

active

07997744

ABSTRACT:
A deformable hinge for use in microelectromechanical devices comprises a protection layer that is electrically conductive. The protection layer is on top of another hinge layer; and is more resistive than the hinge layer to the etchant used in during patterning and/or release processes during fabrication of the microelectromechanical device. As a result, the hinge layer can be protected from being damaged during the fabrication process.

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