Stock material or miscellaneous articles – Coated or structually defined flake – particle – cell – strand,... – Particulate matter
Patent
1995-11-27
1999-03-23
Le, Hoa T.
Stock material or miscellaneous articles
Coated or structually defined flake, particle, cell, strand,...
Particulate matter
427222, B32B 516
Patent
active
058857117
DESCRIPTION:
BRIEF SUMMARY
BACKGROUND OF THE INVENTION
The present invention relates generally to novel electrically conductive polymer compositions, to a process for producing these novel compositions, to substrates coated with a film formed from these novel compositions, and to oxidizing solutions for the production of these compositions.
Electrically conductive polymers and copolymers have proven in recent years to be materials which are particularly advantageous, on the one hand, in the field of microelectronics, especially in photolithographic processes, for example in order to improve electric charge flow, and on the other hand in electrochemistry, for example for the manufacture of rechargeable generators.
More specifically, in microelectronics, such materials are particularly useful for the manufacture of photosensitive conductive resins for processing by electron beam or deep ultraviolet, the manufacture of phase shift masks and conductive charge flow layers for examination by scanning electron microscope, or else plasma engraving. In electrochemistry, these materials are particularly suitable for the storage of electrochemical energy, the manufacture of antistatic conductive materials, and the applications of electrochromism.
Inherently conductive polymers and copolymers are known compounds, and among these polymers and copolymers there may be mentioned poly(thiophenes), polypyrroles, polyacetylenes, polyphenylenes, polythiophene-polypyrrole copolymers, and water-soluble derivatives thereof.
These inherently conductive polymers are generally doped with strong oxidizing compounds.
The compounds which are generally used for doping inherently conductive polymers and copolymers are arsenic pentafluoride (AsF.sub.5), ferric chloride (FeCl.sub.3), nitrosyl tetrafluoroborate (NOBF.sub.4), nitrosyl hexafluorophosphate (NOPF.sub.6), auric chloride (AuCl.sub.3) and ferric tosylate (Fe(OTs).sub.3).
These oxidizing compounds, when used to obtain electrically conductive-polymer compositions, have the disadvantage of comprising metal atoms, a fact which renders their use incompatible with the application of the conductive polymer compositions as photosensitive resins in photolithographic processes. In fact, the presence of metal ions such as boron, phosphorus, iron, arsenic, antimony and gold, for example, threatens to contaminate the various constituents of circuits manufactured from photosensitive resins, including conductive polymers doped with these oxidizing compounds, and therefore to interfere with their electronic properties.
Moreover, the majority of the conductive polymer compositions doped with the above oxidizing compounds show little resistance to aging; in other words, the conductivity of conductive films produced from such conductive polymer compositions decreases rapidly over time. This phenomenon is intensified under the effect of temperature and humidity.
The article titled "Stability studies of the electrical conductivity of various poly(3-alkylthiophenes)" by Y. Wang and M. F. Rubner in Synthetic Metals 39 (1990), pages 153-175, examines more particularly the thermal stability of various poly(3-alkylthiophenes) doped with FeCl.sub.3, Fe(OTs).sub.3 and NOPF.sub.6. This article mentions that the best thermal stability is obtained by using FeCl.sub.3 as oxidizing compound for doping polymers. Moreover, this article mentions that tests aimed at introducing the tosylate anion electrochemically, by using a purely organic compound, namely Bu.sub.4 NOTs, proved fruitless.
The article titled "Photoimaging of Electronically Polymeric Networks" by M. S. A Abdou, G. A. Diaz-Guijada, M. J. Arroyo and S. Holdcroft in Chem. Mater 1991, 3, pages 1003-1006, describes the doping of poly(3-hexylthiophene) with a solution of nitrosyl tetrafluoroborate in acetonitrile. This article also mentions that the polymer thus doped undergoes a marked loss in its conductivity after 30 minutes of atmospheric exposure.
The article "Conducting polymers as Deep-UV electron-beam resist: Direct production of Micrometer Scale conducting Structures from
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Ciprelli Jean Louis
Clarisse Christian
Delabouglise Didier
France Telecom
Le Hoa T.
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