Electrically blowable fuse structure manufacturing for organic i

Details Electrically blowable fuse structure manufacturing for organic i Electrically blowable fuse structure manufacturing for organic i

1994-10-14

1995-11-28

Powell, William

Etching a substrate: processes

Forming or treating electrical conductor article

216 21, 216 67, 216 41, H01B 1300

Patent

active

054699819

ABSTRACT:
An electrically blowable fuse structure usable with organic insulators in microelectronic parts is provided. The fuse structure is made of a first heat resistant member, a fusing element and a second heat resistant member. The heat resistant members are in substantial contact with the fuse and thermally insulate the fuse from the organic insulator. The ends of each fuse are electrically connected to a pair conductors.
A process for fabricating an electrically blowable fuse structure usable with an organic insulator is provided. A substrate with an organic insulator coating and containing electrically conductive features with exposed contacts is provided. A heat shield layer and a fuse layer are deposited sequentially and patterned by subtractive etching. Plurality of conductors are formed over so as to electrically connect each fuse element to a pair of conductors. A second heat resistant member is formed over the fuse area and the substrate is subsequently quoted with an organic insulator.

REFERENCES:
patent: 4602420 (1986-07-01), Saito
patent: 4931353 (1990-06-01), Tanielian

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