Boots – shoes – and leggings
Patent
1992-03-13
1995-01-17
Harvey, Jack B.
Boots, shoes, and leggings
364562, 324716, G01R 3100
Patent
active
053831365
ABSTRACT:
A test structure for submicrometer metrology as used in integrated circuit manufacture comprises a bridge conductor divided into three segments by pairs of voltage taps. A first segment has no intermediate taps; a second segment has a number of dummy taps intermediate its ends; and a third segment has a single central tap, which may typically be formed in a different step than the remainder of the test structure, intermediate its ends. Preferably, the central tap extends from the same side of the bridge conductor as the taps at the ends of the third segment thereof. In order to evaluate a manufacturing operation, for example, to monitor the accuracy of registration of successive manufacturing steps, test signals are applied successively between the pairs of pads. Comparison of the response of the first and second segments to the test signals allows evaluation of the segment shortening effect of the taps; comparison of the response of the two portions of the third segment to the test signals allows evaluation of their lengths, and thus of the accuracy of registration of the step used to form the central tap.
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Allen Richard
Cresswell Michael
Gaitan Michael
Linholm Loren
Angeli Michael de
Harvey Jack B.
Stamber Eric W.
The United States of America as represented by the Secretary of
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