Electrical scanning probe microscope apparatus

Details Electrical scanning probe microscope apparatus Electrical scanning probe microscope apparatus

2005-12-13

2005-12-13

Nguyen, Vinh (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

Reexamination Certificate

active

06975129

ABSTRACT:
An electrical scanning probe microscope (SPM) apparatus. The SPM apparatus is equipped with an atomic force microscope with long-wavelength laser source to acquire topographic images and an electrical scanning sensor operatively coupled to the atomic force microscope to acquire synchronous two-dimensional electrical images. The photoperturbation effects induced by stray light and perturbation of the contrast of SCM images can be ameliorated.

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patent: 6788086 (2004-09-01), Hantschel et al.
G.H. Buh et al. “Factors Influencing the capacitance-voltage characteristics measured by the scanning capacitance microscope” Journal of Applied Physics; (2003), 94 (4), p. 2680-2685.
M.N. Chang et al. “ photovoltaic effect on differential capacitance profiles of low-energy- BF+2-implanted silicon wafers” Applied Physics Letters; (2003), 82(22), p. 3955-3957

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