Electrical resistance with at least two contact fields on a cera

Etching a substrate: processes – Forming or treating electrical conductor article – Forming or treating resistive material

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216 39, 374185, 438 55, H01C 1014

Patent

active

061593869

ABSTRACT:
A temperature-dependent measuring resistance with rapid response time is at least partially arranged on an electrically insulating surface of a ceramic substrate, wherein a portion of the conductor path spans a recess situated in the substrate in a bridge-like manner, and the remaining portion of the conductor path in the edge area of the substrate adjacent to the recess is provided with connection contact fields. The conductor path comprises a platinum or gold layer, wherein the conductor path is partially provided with a cover layer of glass, and wherein the connection contact fields are exposed. In a further embodiment, the conductor path is arranged together with the connection contact fields either on a screen-printed glass membrane or on a thin film membrane applied in a PVD process, which covers the surface of the ceramic substrate and spans the recess. The cover layer is likewise selectively applied by screen printing in case there is a glass membrane. In the case of a thin film membrane, the cover layer is also applied selectively by a PVD process and can be the same material as the thin film membrane. The ceramic substrate preferably comprises aluminum oxide.

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patent: 5466331 (1995-11-01), Belcher
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patent: 5493177 (1996-02-01), Muller et al.
patent: 5542558 (1996-08-01), Benz et al.
patent: 5788854 (1998-08-01), Desaigoudar et al.

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