Electrical probe incorporating scanning proximity microscope

Details Electrical probe incorporating scanning proximity microscope Electrical probe incorporating scanning proximity microscope

1989-12-21

1991-02-12

Wieder, Kenneth

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158R, 324 731, 250306, 250307, G01R 3100, H01J 3726

Patent

active

049927280

ABSTRACT:
An electrical probe which incorporates a scanning proximity microscope for probing the sub-micron features of an integrated circuit. An optical microscope is provided to find the general region of interest, and a piezoelectric tube scanner which controls the position of the probe is disposed at an acute angle to the substrate, so as not to obscure the view of the optical microscope. A number of such probes may be located around the integrated circuit.

REFERENCES:
patent: Re32457 (1987-07-01), Matey
patent: 4267507 (1981-05-01), Guerpont
patent: 4481616 (1984-11-01), Matey
patent: 4724318 (1988-02-01), Binnig
patent: 4806755 (1989-02-01), Duerig et al.
patent: 4814622 (1989-03-01), Gregory et al.
patent: 4837435 (1989-06-01), Sakuhara et al.
Czaka et al., "Optical Transparent Tip for Tunneling Microscope", IBM Technical Disclosure Bulletin, vol. 30, No. 5, Oct. 1987, pp. 369-370.
Davison et al., "New Symmetric Scanning Tunnel Desing", J. Vac. Sci. Technol. A, vol. 6, No. 2, Mar./Apr. 1988, pp. 380-382.
Binnig et al., "Single Tube Three Dimensional Scanner for Scanning Tunneling Microcopy", Rev. Sci. Instrum., 57(8), Aug. 1986, pp. 1688-1689.

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