Electrical particle gun

Details Electrical particle gun Electrical particle gun

1987-09-23

1989-04-25

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

315 17, H01J 3700

Patent

active

048250805

ABSTRACT:
An electrical particle gun with applications in electronic and ionic microlithography for the integrated circuits industry comprises an emission chamber. In the emission chamber are a source adapted to emit the particles and devices for accelerating and focussing the particles. An exciter circuit is electrically connected to a decelerator electrode adjacent the focussing device. This enables pulsed emission of particles with an energy level lying within a predetermined band and filtering of the particles according to their energy level.

REFERENCES:
patent: 3096437 (1963-07-01), Muray
patent: 3164718 (1965-01-01), King
patent: 3600573 (1971-08-01), Watanabe
patent: 3896331 (1975-07-01), Enck
patent: 3970854 (1976-07-01), Boroffka et al.
patent: 4439685 (1984-03-01), Plies
patent: 4454453 (1984-06-01), Sugawara
patent: 4503329 (1985-03-01), Yamaguchi et al.
patent: 4713543 (1987-12-01), Feuerbaum et al.
Journal of Electron Microscopy, vol. 32, No. 4, 1983, pp. 299, 304, Tokyo, JP; A. Takaoka et al.: "Stroboscopic TEM resolutation of 30 mus."
Journal of Vacuum Science & Technology B, vol. 4, No. 1, Jan.-Feb. 1986, pp. 116-119.

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