Electrical measurements of properties of semiconductor devices d

Details Electrical measurements of properties of semiconductor devices d Electrical measurements of properties of semiconductor devices d

1989-04-26

1990-09-11

Eisenzopf, Reinhard J.

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

324671, 324690, 324719, 324716, 324537, 324551, 437 8, G01R 2722, G01R 2726, G01R 3116

Patent

active

049566113

ABSTRACT:
A method for measuring the width of structures in a semiconductor wafer comprises the step of constructing test structures on the wafer shaped to function as moats for confining electrically conductive liquid. The moats have an elongated shape. By measuring the electrical resistance exhibited by the liquid within the moat, the dimensions of the moat and, thus, the other structures on the wafer can be measured.

REFERENCES:
patent: 4103228 (1978-07-01), Ham
patent: 4218649 (1980-08-01), Kutzavitch
patent: 4473795 (1984-09-01), Wood

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