Electrical means for extracting layer to layer registration

Details Electrical means for extracting layer to layer registration Electrical means for extracting layer to layer registration

1996-11-08

1999-01-26

Powell, William

Etching a substrate: processes

Forming or treating electrical conductor article

Forming or treating resistive material

216 61, 216 86, 216 33, B44C 122

Patent

active

058634460

ABSTRACT:
A method for determining a fiducial misregistration of conductive layers of a laminated substrate by providing a plurality of alternatingly disposed dielectric layers and conductive layers. A predetermined area of resistive material is formed as part of at least one conductive layer. Each predetermined area of resistive material is formed at a same corresponding location in each respective conductive layer, and each predetermined area of resistive material has a first end and a second end. A through-via is formed and connected to each predetermined area of resistive material between the first and second ends of each respective predetermined area. A total resistance is determined between the first end and the second end of each predetermined area of resistive material. A first fractional resistance is determined between the first end of each predetermined area of resistive material and the through-via. A second fractional resistance is determined between the second end of each predetermined area of resistive material and the through-via. A fiducial misregistration of each conductive layer with respect to a location of the through-via is determined based on the respective first and second fractional resistances and the respective total resistance for each predetermined area of resistive material.

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