Electrical joint forming member and plasma processing apparatus

Details Electrical joint forming member and plasma processing apparatus Electrical joint forming member and plasma processing apparatus

2006-03-07

2006-03-07

Paumen, Gary (Department: 2833)

Electrical connectors

Contact terminal

Having treated surface or distinct contact surface layer

C439S092000, C439S816000, C439S887000, C439S066000, C174S034000, C174S034000

Reexamination Certificate

active

07008275

ABSTRACT:
An electrical joint forming member is held between adjacent conductive members included in a semiconductor device fabricating apparatus to reduce electrical resistance between those conductive members. The electrical joint forming member includes an elastic member made of a titanium sheet (75 μm thick, 2 mm wide) and having a surface covered with an aluminum layer (7 μm thick), the aluminum layer being formed by joining an aluminum sheet to the surface of the titanium sheet by cold-roll bonding.

REFERENCES:
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patent: 5840953 (1998-11-01), Potts
patent: 5845581 (1998-12-01), Svensson
patent: 5992468 (1999-11-01), Dwiggins
patent: 6182576 (2001-02-01), Svensson
patent: 6396377 (2002-05-01), Ying
patent: 6450103 (2002-09-01), Svensson
patent: 8-120469 (1996-05-01), None
patent: WO 00/75972 (2000-12-01), None

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