Electrical inspecting apparatus with ventilation system

Details Electrical inspecting apparatus with ventilation system Electrical inspecting apparatus with ventilation system

1996-11-20

1999-06-08

Brown, Glenn W.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324765, G01R 3126

Patent

active

059107278

ABSTRACT:
An electrical inspecting apparatus includes an apparatus body having a housing section for housing a cassette in which a plurality of wafers are housed, an inspecting section provided with probes for applying an electrical inspection to the wafer, and a transfer section provided with a transfer arm for transferring the wafer between the housing section and the inspecting section. The housing section, inspecting section and transfer section are arranged side by side within the apparatus body, fan filters are mounted on the apparatus body for blowing air in a lateral direction through the housing section, inspecting section and transfer section, and an exhaust duct is mounted on the apparatus body for discharging the air flowing through the sections to the outside of the apparatus body.

REFERENCES:
patent: 4770680 (1988-09-01), Machida et al.
patent: 4888549 (1989-12-01), Wilson et al.
patent: 5429642 (1995-07-01), Ohkuma
patent: 5451884 (1995-09-01), Sauerland
patent: 5473258 (1995-12-01), Abe

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